| 1. | With the improvement of integrated circuits , the requirements to crystalline perfection and its electrical properties have changed greatly , especially the micro - areas electrical properties and its uniformity 随着集成电路由超大规模向甚大规模的发展,对晶体的完美性、电学特性提出更为严格的要求,特别是微区的电特性及其均匀性更引起人们的关注。 |